Background Statement for semi draft Document 5556 Line Item Revision to semi s2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment


Example of seismic design load based on standards/Codes applicable for known semiconductor manufacturing location



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Example of seismic design load based on standards/Codes applicable for known semiconductor manufacturing location

  1. United States

    1. The horizontal seismic loadings are based on following assumptions for factors (Equation 13.3-1, 13.3-2, and 13.3-3 in § 13.3.1) in ASCE7-10:

R4-3.2-1

Fp is not required to be taken as greater than:

R4-3.2-2

and Fp should not be taken as less than:

R4-3.2-3

Fp: seismic design force

SDS: design, 5 percent damped, spectral response acceleration parameter at short periods as defined in §11.4.4 of ASCE7-10



where:

ap: component amplification factor RP : component response modification factor

Ip: component importance factor

WP: component operating weight

z = Height in structure at point of attachment of component with respect to the base.

h = Average roof height of structure with respect to the base.

        1. Assumptions Used for Above Derivation

        2. Generally equipment is considered rigid. In this case a frequency response analysis is not necessary.

        3. Generally equipment does not use vibration isolation. In case of the component supported by vibration isolators, the value of ap should be changed to 2.5 in Equation R4-3.2-1, Equation R4-3.2-2 and Equation R4-3.2-3 and should calculate the Fp for the each case.

        4. Vertical Seismic Load — Based on § 13.3.1 in ASCE7-10, the nonstructural component should be designed for a concurrent force ±0.2SDSWP.

R4-3.2-4

      1. Taiwan

        1. The horizontal seismic loadings are based on following assumptions for factors.

R4-3. 2-5

Fp is not required to be taken as greater than:

R4-3.2-6

and Fp should not be taken as less than:

R4-3.2-7

Fp: seismic design force

SDS: design, 5 percent damped, spectral response acceleration parameter at short periods

where:

ap: component amplification factor

Rpa : Allowable seismic response modification factor

Rp: Component amplification factor defined in Table 4-1 12 .(Other rigid equipment)

Ip: component importance factor

WP: component operating weight

hx /hn; Height of the structure in the fixed point of the components

Minimum seismic force for horizontal design

                    R4-3.2-8

        1. Vertical Seismic Load — Based on TBC

R4-3.2-9

        1. Minimum seismic force for vertical design: Near-fault region

        2. R4-3.2-10

Where, Fph is the horizontal design force, which is the same as Fp used in TBC


      1. Japan

In Japan, there are several guidelines for non-structural elements or building equipment. “Seismic Design and Construction Guideline for Building Equipment” published by Building Center of Japan (BCJ) were conformed to The Building Standard Law of Japan and have been adopted as a jurisdictional requirement to the building constructions. Appropriateness of the criteria in the guideline has been verified in several large earthquakes over 6 Lower of the JMA Seismic Intensity in Japan (http://www.jma.go.jp/jma/kishou/know/shindo/explane.html). In the guideline mentioned above, the basic seismic coefficient for equipment is 0.4 and the values of design horizontal seismic coefficient are 0.4, 0.6, 1.0, 1.5 and 2.0. If designers practice dynamic analysis or other detail calculation methods to determine the design horizontal seismic coefficient, values should be rounded and classified to the five values mentioned above. In this guideline, the vertical loading is set to be 50% of horizontal loading.  








Design Horizontal Seismic Coefficient Ks

Classification of applied floor

Seismic Resistant Class S

Seismic Resistant

Class A

Seismic Resistant

Class B




Upper Floors

Roof or Penthouse

2.0

1.5

1.0


Penthouse
     


Upper Floors

Middle Floors

First Floor

Basement



Middle Floors

1.5

1.0

0.6

Basement or First Floor

1.0(1.5)

0.6(1.0)


0.4(0.6)


The values within parentheses shall be applied to water tanks installed on the basement, on the first floor or on the ground.

Definition of upper floors:

The top floor of two to six-story buildings shall be the upper floor.

The top floor and the next to the top floor of seven- to nine-story buildings shall be the upper floors.

The rest is omitted.

Definition of middle floors:

The floors except basement, first floor or upper floors shall be the middle floors.

Note: Application of each seismic resistant class.

  1. Seismic resistant class shall be applied to the equipment, considering its response amplification factor.

(Example: Components on vibration isolation devices shall be applied the seismic resistant class A or S.)

  1. Seismic resistant class shall be applied to the building or equipment, considering their functions during or after severe earthquakes (e.g., disaster prevention center or important water tank)

The rest is omitted.




      1. Europe

    1. It was intention of Japan Seismic protection TF to include values of seismic protection design load and supporting formula that are applicable in Europe. As the TF was unable to identify the adequate reference to fulfill its intention at the time of preparation of this revision of S2, the information is not provided in this revision. It is expectation of the TF to add the information in future revision.


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