Background Statement for semi draft Document 5556 Line Item Revision to semi s2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment


Source for Examples of Seismic Anchorage Details



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Source for Examples of Seismic Anchorage Details

  1. Detailed illustrations of examples of seismic anchorage details were developed by Working Group #9 of the Japan 300 mm (“J300”) effort, and were printed in their Report No. 9 in the 2nd Lecture, ICs Factory Design for 300 mm Wafer Line Standardizing Study, December, 1996.

  2. Design Example (refer to Figure R4-1 for illustration of example)

    1. Disclaimer: the calculations below are not a complete seismic analysis. A complete analysis might also include such things as: stress distribution through a multiple-fastener connection; prying action; bearing stress; simultaneous combined stresses on the fasteners; and a review of weld geometry. A complete seismic analysis should be done by a qualified engineer.

      1. Design Example (refer to Figure R4-1 for illustration of example)

Disclaimer: the calculations below are not a complete seismic analysis. A complete analysis might also include such things as: stress distribution through a multiple-fastener connection; prying action; bearing stress; simultaneous combined stresses on the fasteners; and a review of weld geometry. A complete seismic analysis should be done by a qualified engineer. R4-1 Source for Examples of Seismic Anchorage Details

      1. Design Example (refer to Figure R4-1 、R4-2 for illustration of example)




Figure R4-1





Figure R4-2


G: Center of Gravity

Wp: Weight of equipmentkN)

Rb: Force per anchor boltkN)

nTotal number of anchor bolts

ntThe total number of anchor bolts on the side that is pulled when considering the equipment overturning.

hGThe height of the center of gravity from installation surface of the equipment

l: The bolt span, looking from the side under investigation. (m)

lGThe distance from the bolt to the equipment center of gravity, looking from the side under investigation

However lG1/2(m)

Fph: Horizontal design seismic forcekN)

Fpv: Vertical design seismic forcekN) 

    1. Calculation of Overturning Force

      1. Vertical seismic force is refereed by R4-3.3  Fpv=0.15 WP

      2. The force required to pull out an anchor bolt is shown below



For HPM Equipment,









When Rb≧0 the equipment may overturn

When there is a possibility of the equipment overturning, overturning prevention fittings are required

When Rb < 0 the equipment will not overturn


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